Buried silicon dioxide formation in a precursor nanocavity layer in Si

  1. Van Veen, A.
  2. Rivera, A.
  3. Schut, H.
  4. Van Gog, H.
Journal:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Year of publication: 2004

Volume: 216

Issue: 1-4

Pages: 264-268

Type: Conference paper

DOI: 10.1016/J.NIMB.2003.11.044 GOOGLE SCHOLAR
Data source: Scopus