Buried silicon dioxide formation in a precursor nanocavity layer in Si

  1. Van Veen, A.
  2. Rivera, A.
  3. Schut, H.
  4. Van Gog, H.
Revue:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Année de publication: 2004

Volumen: 216

Número: 1-4

Pages: 264-268

Type: Communication dans un congrès

DOI: 10.1016/J.NIMB.2003.11.044 GOOGLE SCHOLAR
La source de données: Scopus