Buried silicon dioxide formation in a precursor nanocavity layer in Si

  1. Van Veen, A.
  2. Rivera, A.
  3. Schut, H.
  4. Van Gog, H.
Aldizkaria:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Argitalpen urtea: 2004

Alea: 216

Zenbakia: 1-4

Orrialdeak: 264-268

Mota: Biltzar ekarpena

DOI: 10.1016/J.NIMB.2003.11.044 GOOGLE SCHOLAR
Datuen iturria: Scopus