Low temperature epitaxial oxide ultrathin films and nanostructures by atomic layer deposition

  1. Coll, M.
  2. Gazquez, J.
  3. Palau, A.
  4. Varela, M.
  5. Obradors, X.
  6. Puig, T.
Journal:
Chemistry of Materials

ISSN: 0897-4756,  1520-5002

Year of publication: 2012

Volume: 24

Issue: 19

Pages: 3732-3737

Type: Article

DOI: 10.1021/CM301864C GOOGLE SCHOLAR
Data source: Scopus