Low temperature epitaxial oxide ultrathin films and nanostructures by atomic layer deposition

  1. Coll, M.
  2. Gazquez, J.
  3. Palau, A.
  4. Varela, M.
  5. Obradors, X.
  6. Puig, T.
Revue:
Chemistry of Materials

ISSN: 0897-4756 1520-5002

Année de publication: 2012

Volumen: 24

Número: 19

Pages: 3732-3737

Type: Article

DOI: 10.1021/CM301864C GOOGLE SCHOLAR