One-step fabrication of large area arrays of dots by electron beam lithography

  1. Pérez-Junquera, A.
  2. Martín, J.I.
  3. Alameda, J.M.
Aldizkaria:
Microelectronic Engineering

ISSN: 0167-9317

Argitalpen urtea: 2007

Alea: 84

Zenbakia: 5-8

Orrialdeak: 845-847

Mota: Artikulua

DOI: 10.1016/J.MEE.2007.01.129 GOOGLE SCHOLAR
Datuen iturria: Scopus