One-step fabrication of large area arrays of dots by electron beam lithography
- Pérez-Junquera, A.
- Martín, J.I.
- Alameda, J.M.
ISSN: 0167-9317
Année de publication: 2007
Volumen: 84
Número: 5-8
Pages: 845-847
Type: Article
Revue:
Microelectronic Engineering