MARÍA LUISA
LUCÍA MULAS
Catedrática de universidad
Mª Angela
Pampillon Arce
Publicaciones en las que colabora con Mª Angela Pampillon Arce (6)
2014
2013
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Optimization of in situ plasma oxidation of metallic gadolinium thin films deposited by high pressure sputtering on silicon
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, Vol. 31, Núm. 1
2012
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Optimization of scandium oxide growth by high pressure sputtering on silicon
Thin Solid Films, Vol. 526, pp. 81-86
2011
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Anomalous thermal oxidation of gadolinium thin films deposited on silicon by high pressure sputtering
Microelectronic Engineering, Vol. 88, Núm. 9, pp. 2991-2996
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Interface engineering by metal electrode scavenging of Gd2O 3 films sputtered on Si
Proceedings of the 8th Spanish Conference on Electron Devices, CDE'2011
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Towards metal electrode interface scavenging of rare-earth scandates: A Sc2O3 and Gd2O3 study
Microelectronic Engineering