ÁLVARO DEL
PRADO MILLÁN
Profesor titular de universidad
Mª Angela
Pampillon Arce
Publicaciones en las que colabora con Mª Angela Pampillon Arce (6)
2014
2013
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High pressure sputtering as a viable technique for future high permittivity dielectric on III-V integration: GdOx on InP demonstration
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, Vol. 31, Núm. 1
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Towards high-k integration with III-V channels: Interface optimization of high pressure sputtered gadolinium oxide on indium phospide
Proceedings of the 2013 Spanish Conference on Electron Devices, CDE 2013
2011
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Anomalous thermal oxidation of gadolinium thin films deposited on silicon by high pressure sputtering
Microelectronic Engineering, Vol. 88, Núm. 9, pp. 2991-2996
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Interface engineering by metal electrode scavenging of Gd2O 3 films sputtered on Si
Proceedings of the 8th Spanish Conference on Electron Devices, CDE'2011
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Towards metal electrode interface scavenging of rare-earth scandates: A Sc2O3 and Gd2O3 study
Microelectronic Engineering