Publicaciones en colaboración con investigadores/as de Instituto de Microelectrónica de Barcelona (9)

2011

  1. DRIE based technology for 3D silicon barcodes fabrication

    Sensors and Actuators, B: Chemical

2010

  1. Pattern transfer optimization for the fabrication of arrays of silicon nanowires

    Microelectronic Engineering, Vol. 87, Núm. 5-8, pp. 1479-1482

2009

  1. DRIE based technology for 3D silicon barcodes fabrication

    Procedia Chemistry

  2. Label-free cancer cell detection with impedimetric transducers

    Analytical Chemistry, Vol. 81, Núm. 24, pp. 10167-10171

  3. Patterning of ALD HfO2 layers on silicon

    ECS Transactions

  4. Silicon based devices for intracellular applications

    IFMBE Proceedings

  5. Thin high-k dielectric layers deposited by ALD

    Proceedings of the 2009 Spanish Conference on Electron Devices, CDE'09

2007

  1. DRIE based novel technique for AFM probes fabrication

    Microelectronic Engineering, Vol. 84, Núm. 5-8, pp. 1132-1135

  2. Membrane-suspended microgrid as a gas preconcentrator for chromatographic applications

    Sensors and Actuators, A: Physical, Vol. 135, Núm. 1, pp. 192-196