Pattern transfer optimization for the fabrication of arrays of silicon nanowires

  1. Gebremichael, Y.
  2. Sánchez, A.
  3. Borrise, X.
  4. Schmidt, M.
  5. Goñi, A.R.
  6. Alonso, M.I.
  7. Rurali, R.
  8. Suñé, J.
  9. Cartoixa, X.
  10. Pérez-Murano, F.
Journal:
Microelectronic Engineering

ISSN: 0167-9317

Year of publication: 2010

Volume: 87

Issue: 5-8

Pages: 1479-1482

Type: Article

DOI: 10.1016/J.MEE.2009.11.086 GOOGLE SCHOLAR
Data source: Scopus