Pattern transfer optimization for the fabrication of arrays of silicon nanowires

  1. Gebremichael, Y.
  2. Sánchez, A.
  3. Borrise, X.
  4. Schmidt, M.
  5. Goñi, A.R.
  6. Alonso, M.I.
  7. Rurali, R.
  8. Suñé, J.
  9. Cartoixa, X.
  10. Pérez-Murano, F.
Revue:
Microelectronic Engineering

ISSN: 0167-9317

Année de publication: 2010

Volumen: 87

Número: 5-8

Pages: 1479-1482

Type: Article

DOI: 10.1016/J.MEE.2009.11.086 GOOGLE SCHOLAR
La source de données: Scopus