DRIE based technology for 3D silicon barcodes fabrication
- Gómez-Martínez, R.
- Sánchez, A.
- Duch, M.
- Esteve, J.
- Plaza, J.A.
ISSN: 1876-6196
Year of publication: 2009
Volume: 1
Issue: 1
Pages: 800-803
Type: Conference paper
ISSN: 1876-6196
Year of publication: 2009
Volume: 1
Issue: 1
Pages: 800-803
Type: Conference paper