Influence of the deposition parameters on the bonding and optical properties of SiNx ECR films

  1. Garcia, S.
  2. Martin, J.M.
  3. Martil, I.
  4. Fernandez, M.
  5. Iborra, E.
  6. Gonzalez-Diaz, G.
Journal:
Journal of Non-Crystalline Solids

ISSN: 0022-3093

Year of publication: 1995

Volume: 187

Pages: 329-333

Type: Article

DOI: 10.1016/0022-3093(95)00159-X GOOGLE SCHOLAR