Influence of the deposition parameters on the bonding and optical properties of SiNx ECR films
- Garcia, S.
- Martin, J.M.
- Martil, I.
- Fernandez, M.
- Iborra, E.
- Gonzalez-Diaz, G.
Revue:
Journal of Non-Crystalline Solids
ISSN: 0022-3093
Année de publication: 1995
Volumen: 187
Pages: 329-333
Type: Article