Compositional analysis of SiOxNy:H films by heavy-ion ERDA: The problem of radiation damage
- Bohne, W.
- Fuhs, W.
- Röhrich, J.
- Selle, B.
- Sieber, I.
- Del Prado, A.
- San Andrés, E.
- Mártil, I.
- González-Díaz, G.
ISSN: 0142-2421
Year of publication: 2002
Volume: 34
Issue: 1
Pages: 749-753
Type: Conference paper