Electrical behavior of silicon nitride sputtered thin films
- Vila, M.
- Prieto, C.
- Ramírez, R.
ISSN: 0040-6090
Year of publication: 2004
Volume: 459
Issue: 1-2
Pages: 195-199
Type: Conference paper
ISSN: 0040-6090
Year of publication: 2004
Volume: 459
Issue: 1-2
Pages: 195-199
Type: Conference paper