Growth of vacancy clusters during post-irradiation annealing of ion implanted silicon
- van Veen, A.
- Schut, H.
- Rivera, A.
- Fedorov, A.V.
Proceedings:
Materials Research Society Symposium - Proceedings
ISSN: 0272-9172
Year of publication: 1996
Volume: 396
Pages: 155-160
Type: Conference paper