ÁLVARO DEL
PRADO MILLÁN
Profesor titular de universidad
M.A.
Fernández Fernández
Publicaciones en las que colabora con M.A. Fernández Fernández (7)
2005
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Oxygen to silicon ratio determination of SiOxHy thin films
Thin Solid Films, Vol. 492, Núm. 1-2, pp. 232-235
2003
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Bonding configuration and density of defects of SiOxH y thin films deposited by the electron cyclotron resonance plasma method
Journal of Applied Physics, Vol. 94, Núm. 12, pp. 7462-7469
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Microstructural modifications induced by rapid thermal annealing in plasma deposited SiOxNyHz films
Journal of Applied Physics, Vol. 94, Núm. 2, pp. 1019-1029
2002
1999
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Effect of substrate temperature in SiOxNy films deposited by electron cyclotron resonance
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 17, Núm. 4, pp. 1263-1268
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Full composition range silicon oxynitride films deposited by ECR-PECVD at room temperature
Thin Solid Films, Vol. 343-344, Núm. 1-2, pp. 437-440