MARÍA LUISA
LUCÍA MULAS
Catedrática de universidad
Maria
Toledano Luque
Publicaciones en las que colabora con Maria Toledano Luque (12)
2011
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Anomalous thermal oxidation of gadolinium thin films deposited on silicon by high pressure sputtering
Microelectronic Engineering, Vol. 88, Núm. 9, pp. 2991-2996
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Electrical and chemical characterization of high pressure sputtered scandium oxide for memory applications
Proceedings of the 8th Spanish Conference on Electron Devices, CDE'2011
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Electrical characterization of high-pressure reactive sputtered ScO x films on silicon
Thin Solid Films, Vol. 519, Núm. 7, pp. 2268-2272
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Interface engineering by metal electrode scavenging of Gd2O 3 films sputtered on Si
Proceedings of the 8th Spanish Conference on Electron Devices, CDE'2011
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Towards metal electrode interface scavenging of rare-earth scandates: A Sc2O3 and Gd2O3 study
Microelectronic Engineering
2010
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Electrical characterization of high-pressure reactive sputtered Sc 2O3 films on silicon
ECS Transactions
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Nitridation of Si by N2 electron cyclotron resonance plasma and integration with ScOx deposition
Journal of the Electrochemical Society, Vol. 157, Núm. 4
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Scandium oxide deposited by high-pressure sputtering for memory devices: Physical and interfacial properties
Journal of Applied Physics, Vol. 107, Núm. 8
2009
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Growth of silicon nitride on silicon by electron cyclotron resonance plasma nitridation
Proceedings of the 2009 Spanish Conference on Electron Devices, CDE'09
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Interfacial properties of HfO2/SiN/Si gate structures
Proceedings of the 2009 Spanish Conference on Electron Devices, CDE'09
2007
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High-pressure reactively sputtered Hf O2: Composition, morphology, and optical properties
Journal of Applied Physics, Vol. 102, Núm. 4
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Optical spectroscopic study of the SiN/HfO2 interfacial formation during rf sputtering of HfO2
Applied Physics Letters, Vol. 91, Núm. 19