Publications in collaboration with researchers from Instituto de Ciencia de Materiales de Madrid (12)

2009

  1. Continuous and localized Mn implantation of ZnO

    Nanoscale Research Letters, Vol. 4, Núm. 8, pp. 878-887

2005

  1. Oxygen to silicon ratio determination of SiOxHy thin films

    Thin Solid Films, Vol. 492, Núm. 1-2, pp. 232-235

1999

  1. Effect of substrate temperature in SiOxNy films deposited by electron cyclotron resonance

    Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 17, Núm. 4, pp. 1263-1268

  2. Full composition range silicon oxynitride films deposited by ECR-PECVD at room temperature

    Thin Solid Films, Vol. 343-344, Núm. 1-2, pp. 437-440

1995

  1. Analysis of the oxygen contamination present in SiNx films deposited by electron cyclotron resonance

    Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films