Instituto de Ciencia de Materiales de Madrid -ko ikertzaileekin lankidetzan egindako argitalpenak (12)

2009

  1. Continuous and localized Mn implantation of ZnO

    Nanoscale Research Letters, Vol. 4, Núm. 8, pp. 878-887

2005

  1. Oxygen to silicon ratio determination of SiOxHy thin films

    Thin Solid Films, Vol. 492, Núm. 1-2, pp. 232-235

1999

  1. Effect of substrate temperature in SiOxNy films deposited by electron cyclotron resonance

    Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 17, Núm. 4, pp. 1263-1268

  2. Full composition range silicon oxynitride films deposited by ECR-PECVD at room temperature

    Thin Solid Films, Vol. 343-344, Núm. 1-2, pp. 437-440

1995

  1. Analysis of the oxygen contamination present in SiNx films deposited by electron cyclotron resonance

    Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films