IGNACIO
MARTIL DE LA PLAZA
Catedrático de universidad
M.A.
Fernández Fernández
Publicaciones en las que colabora con M.A. Fernández Fernández (13)
2005
-
Oxygen to silicon ratio determination of SiOxHy thin films
Thin Solid Films, Vol. 492, Núm. 1-2, pp. 232-235
2003
-
Bonding configuration and density of defects of SiOxH y thin films deposited by the electron cyclotron resonance plasma method
Journal of Applied Physics, Vol. 94, Núm. 12, pp. 7462-7469
-
Microstructural modifications induced by rapid thermal annealing in plasma deposited SiOxNyHz films
Journal of Applied Physics, Vol. 94, Núm. 2, pp. 1019-1029
2002
1999
-
Effect of substrate temperature in SiOxNy films deposited by electron cyclotron resonance
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 17, Núm. 4, pp. 1263-1268
-
Full composition range silicon oxynitride films deposited by ECR-PECVD at room temperature
Thin Solid Films, Vol. 343-344, Núm. 1-2, pp. 437-440
1998
-
Deposition of SiNx: H thin films by the electron cyclotron resonance and its application to Al/SiNx:H/Si structures
Journal of Applied Physics, Vol. 83, Núm. 1, pp. 332-338
-
Deposition of low temperature Si-based insulators by the electron cyclotron resonance plasma method
Thin Solid Films, Vol. 317, Núm. 1-2, pp. 116-119
-
Good quality Al/SiNx:H/InP metal-insulator-semiconductor devices obtained with electron cyclotron resonance plasma method
Journal of Applied Physics, Vol. 83, Núm. 1, pp. 600-603
1996
-
Properties of a-SiNx.: H films deposited at room temperature by the electron cyclotron resonance plasma method
Philosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties, Vol. 73, Núm. 3, pp. 487-502
1995
-
Influence of the deposition parameters on the bonding and optical properties of SiNx ECR films
Journal of Non-Crystalline Solids, Vol. 187, pp. 329-333
-
Role of oxygen on the dangling bond configuration of low oxygen content SiNx:H films deposited at room temperature
Applied Physics Letters, Vol. 67, pp. 3263